Abstract: We employ COMSOL Multiphysics to develop and analyze a novel tri-layered MEMS-based capacitive pressure sensor. The sensor comprises gold electrodes, a composite dielectric layer consisting ...

Abstract: In this study, multiple models of the sensing element for a capacitive accelerometer were developed, and a preliminary analysis was conducted to assess the alignment of the first natural ...

COMSOL Multiphysics version 6.4 accelerates engineering simulations and multiphysics models. Full GPU support across all physics delivers up to 5× speedups in benchmarks. COMSOL now supports GPU ...